Precision Slit 2016

Technische Beschreibung:

The FMB precision slit is a precisely controllable aperture. Two highly precise blades are being moved parallel and symmetrically by a backlash-free flexure mechanism. The gap size is usually defined in vertical direction only but systems with a second blade pair defining an additional aperture in horizontal direction are also available.
The precision slit assembly is based on a DN150CF flange and can be mounted on top of any sufficient vacuum chamber. Using diagonal viewports in the vacuum chamber, it is possible to observe the opening of the slit gap. A viewport orientated orthogonally to the incoming allows a grazing incidence view to the blade edge, useful for surveying of the longitudinal slit position.
Different support designs are available on request. Granite or concrete based supports are typically used.

The slit blades can be either electrically isolated or temperature stabilized. In the latter case, the blades are connected via Copper braids to the water cooling. When electrically isolated, the photo current of each blade can be measured individually.
A fluorescence screen can be mounted at the upstream side of the slit blades just below the bottom blade edge or above the upper blade edge. It allows a fluorescence image by keeping the beam path through the precision slit unobstructed.


Technische Daten:

Blade material   Tungsten or Tungsten-Carbide (other materials on request)
Blade edge length   38 mm
Blade thickness   2.5 mm
Thickness at blade edge   ≤ 0.1 mm
Blade rear side rake angle   10° or 20° (other angles available on request)
Edge straightness & roughness   ≤ 1 µm
Slit gap parallelism   ≤ 1 µm over 20 mm edge length
Minimum slit gap   0 mm (closed slit)
Maximum slit gap   2.5 mm (symmetrically opened)
Drive   Stepper motor
Fullstep resolution   0.05 µm (gap size) / full step
Encoder resolution Incremental encoder Absolute encoder   0.05 µm (gap size) / count 0.05 nm (gap size) / count
Repeatability   ≤ 1 µm
Limit switches   2 limit switches per limit, normally closed
Vacuum compatibility   UHV (10-10 mbar)
Baking temperature   200°C for all vacuum sided parts
100°C for all air sided parts incl. precision feedthrough
Options, available on request:  
  • Blade material - Blade rake angle
  • Blade mounting type (electrically isolated for current measurement OR cooled for temperature stabilization)
  • Encoder type (incremental OR absolute)
  • Fluorescence screen
  • Single OR double slit
  • Chamber for slit system
  • Support for slit system
  • Longitudinal linear slide system
  • Vertical/horizontal motorized stage ±5mm


Datenblatt Precision Slit

September 21, 2022
Spalt Systeme
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