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Slit System for apertures V1_2003
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Slit System for Apertures

Double Slit Assembly

Slit System for Apertures

Double Slit Assembly.

Slit System for Apertures

Double Slit Assembly.

Slit System for Apertures

Double Slit Assembly.

Slit System for Apertures

Double Slit Assembly.


Technische Beschreibung


Each system consists of two or four slit heads and manipulators.

The slit system is based on a uniform and modular concept with
  • stroke unit optionally driven by stepping motor with or without synchronous belt gear
  • cooled or uncooledslit jaws made of OFHC-Copper, Glidcop® or Tungsten

The linear drive system is mounted on a base flange CF100. The system can be equipped with end switches, reference points or linear encoders. The linear feedthrough to the vacuum is realised by a welded bellow. The vacuum side interface for the elements to be moved is a flange CF54.
Depending on the heat load and the slit precision various slit heads can be connected to that interface flange on the vacuum side. A standard slit head consists of e.g. an inclined copper or Glidcop® plate with water cooling on the backside. In case of a high thermal load a tungsten cutting edge is inserted into the copper plate. For temperature control of the slit head a thermocouple can be fitted as an option.

Technische Daten


Dimensions of manipulator slit system:
- Width (with synchronous belt drive)
- Height

228 mm
310 mm outside basic flange

Base flange: DN 100 CF

Interface flange: DN 54 CF

Stroke: ± 12.5 mm

Resolution: 0.001 mm

Repeatability: 0.002 mm

Repeat accuracy of reference point switch: ± 0,002 mm

Leakage rate: < 1 x 10-10 mbar l s-1