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Precision slit ( entrance and exit slit ) V2_2008
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Technische Beschreibung


The precision slit assembly is a backlash free spring pivot system allowing an accurate symmetric and parallel opening and closing of the two slit jaws. It is driven by one single linear feedthrough.
This precision feedthrough can be chosen as manual or motorized type. The motorized type is driven by a stepper motor.
The slit assembly is mounted on a CF150 base flange which has fiducial holes on its air side for alignment and surveying. Water cooling of the slit jaws and / or their electrical insulation for drain current measurements are possible options.
The slit chamber has a nominal size of 150CF and can contain several other ports for a pre-aperture, viewports, fluorescent screens and an ion pump a.s.o.. The whole slit chamber can be moved along the beam direction by a manual or stepper-motor-driven precision linear guide system. The necessary length compensation is realised with welded bellows upstream and downstream of the slit chamber.
The linear guidesystemissupportedbya rigid steelframesupportora block made of concrete or granite. They allow an accurate alignment of the slit system with respect to the beam axis.

Technische Daten


Slit subassembly
- Slit opening range
- Repeatability of the slit opening
- Step size of the slit opening
..(with stepper motor linear feedthrough)
- Slit jaw length
- Slit jaw parallelism

0...3 mm
< 3 µm

< 1 µm / step
30 mm
< 3 µm

Linear system for travel parallel to the beam
- Beam direction stroke
- Positioning accuracy
- Travelling accuracy

Up to ± 500 mm
± 0.2 mm
± 10 µm

Support
- Elevation and lateral adjustment range of the
..adjustment elements
- Adjusting elements accuracy


± 10 mm
± 0.05 mm

Nominal width of ports
- Pump flange
- Entry and exit flange or membrane bellows

DN 100 CF
DN 35 CF
Option: DN 63 CF

Slit cooling
- Indirect water cooling using flexible copper braids

as Option

Drain current measurement
- Using floating shields feedthroughts and
..Aluminium-Nitride insulation


as Option