Home Slit Systeme
Slit Systeme
PDF Drucken
Galerien


Beschreibungen

Precision slit ( entrance and exit slit ) V1_2003

Read More... | Pictures... | Downloads...


Technische Beschreibung


The exit slit is designed as a backlash free spring pivot system allowing a symmetricaly and exactly parallel opening and closing of the two slit jaws with one single linear precision feedthrough.
It can be driven by a manual precision linear feedthrough or alternatively by a stepper-motordriven linear feedthrough with high accuracy. The whole slit assembly is mounted on a CF150 base flange. Outside the base flange are reference points for the alignment.
The water cooling of the slit jaws or their electrical insulation for photon current measurement are possible options.
The slit chamber has a nominal size of 150CF and additional ports for a ion pump as well as flanges for e.g. view ports, fluorescent screens a.s.o..
The whole slit chamber can be moved along the beam direction by a manual or stepper-motordriven precision linear guide system. The necessary length compensation is realised with
welded bellows.
The whole unit is mounted on a rigid steel frame support which contains elevation and lateral adjustment elements. It allows a exact air-side alignment of the slit to the beam axis.

Technische Daten


Slit subassembly
- Slit opening range
- Repeatability of the slit opening
- Step size of the slit opening
..(with stepper motor linear feedthrough)
- Slit jaw length
- Slit jaw parallelism

0...3 mm
< 3 µm

< 1 µm / step
30 mm
< 3 µm

Linear system for travel parallel to the beam
- Beam direction stroke
- Positioning accuracy
- Travelling accuracy

Up to ± 500 mm
± 0.2 mm
± 10 µm

Frame support
- Elevation and lateral adjustment range of the
..adjustment elements
- Adjusting elements accuracy


± 10 mm
± 0.05 mm

Nominal width of ports
- Pump flange
- Entry and exit flange or membrane bellows

DN 100 CF
DN 35 CF



 

Precision slit ( entrance and exit slit ) V2_2008

Read More... | Pictures... | Downloads...


Technische Beschreibung


The precision slit assembly is a backlash free spring pivot system allowing an accurate symmetric and parallel opening and closing of the two slit jaws. It is driven by one single linear feedthrough.
This precision feedthrough can be chosen as manual or motorized type. The motorized type is driven by a stepper motor.
The slit assembly is mounted on a CF150 base flange which has fiducial holes on its air side for alignment and surveying. Water cooling of the slit jaws and / or their electrical insulation for drain current measurements are possible options.
The slit chamber has a nominal size of 150CF and can contain several other ports for a pre-aperture, viewports, fluorescent screens and an ion pump a.s.o.. The whole slit chamber can be moved along the beam direction by a manual or stepper-motor-driven precision linear guide system. The necessary length compensation is realised with welded bellows upstream and downstream of the slit chamber.
The linear guidesystemissupportedbya rigid steelframesupportora block made of concrete or granite. They allow an accurate alignment of the slit system with respect to the beam axis.

Technische Daten


Slit subassembly
- Slit opening range
- Repeatability of the slit opening
- Step size of the slit opening
..(with stepper motor linear feedthrough)
- Slit jaw length
- Slit jaw parallelism

0...3 mm
< 3 µm

< 1 µm / step
30 mm
< 3 µm

Linear system for travel parallel to the beam
- Beam direction stroke
- Positioning accuracy
- Travelling accuracy

Up to ± 500 mm
± 0.2 mm
± 10 µm

Support
- Elevation and lateral adjustment range of the
..adjustment elements
- Adjusting elements accuracy


± 10 mm
± 0.05 mm

Nominal width of ports
- Pump flange
- Entry and exit flange or membrane bellows

DN 100 CF
DN 35 CF
Option: DN 63 CF

Slit cooling
- Indirect water cooling using flexible copper braids

as Option

Drain current measurement
- Using floating shields feedthroughts and
..Aluminium-Nitride insulation


as Option


 

Slit System for apertures V1_2003

Read More... | Pictures... | Downloads...


Technische Beschreibung


Each system consists of two or four slit heads and manipulators.

The slit system is based on a uniform and modular concept with
  • stroke unit optionally driven by stepping motor with or without synchronous belt gear
  • cooled or uncooledslit jaws made of OFHC-Copper, Glidcop® or Tungsten

The linear drive system is mounted on a base flange CF100. The system can be equipped with end switches, reference points or linear encoders. The linear feedthrough to the vacuum is realised by a welded bellow. The vacuum side interface for the elements to be moved is a flange CF54.
Depending on the heat load and the slit precision various slit heads can be connected to that interface flange on the vacuum side. A standard slit head consists of e.g. an inclined copper or Glidcop® plate with water cooling on the backside. In case of a high thermal load a tungsten cutting edge is inserted into the copper plate. For temperature control of the slit head a thermocouple can be fitted as an option.

Technische Daten


Dimensions of manipulator slit system:
- Width (with synchronous belt drive)
- Height

228 mm
310 mm outside basic flange

Base flange: DN 100 CF

Interface flange: DN 54 CF

Stroke: ± 12.5 mm

Resolution: 0.001 mm

Repeatability: 0.002 mm

Repeat accuracy of reference point switch: ± 0,002 mm

Leakage rate: < 1 x 10-10 mbar l s-1


 

Slit System for apertures V2_2008

Read More... | Pictures... | Downloads...


Technische Beschreibung


Each system consists of two or four slit heads and manipulators.

The slit system is based on a uniform and modular concept with
  • stroke unit optionally driven by stepping motor with or without synchronous belt gear
  • cooled or uncooledslit jaws made of OFHC-Copper, Glidcop® or Tungsten

The linear drive system is mounted on a base flange CF63 or CF35. The system can be equipped with limit switches, reference switches or linear encoders. The manually driven or motorized linear feedthrough to the vacuum is realised by a welded bellows (size 63 or 35).
Depending on the heat load and the slit precision various slit heads can be connected to that interface flange on the vacuum side.
A standard slit head consists of e.g. an inclined Copper or Glidcop®plate with water cooling on the backside.
In case of a high thermal load a Tungsten cutting edge is inserted into the copper plate. For temperature control of the slit head a thermocouple can be fitted as an option.
As an further option FMB offers the drain measurement on the insulated aperture blades.

Technische Daten


Dimensions of manipulator slit system:
- Width (with synchronous belt drive)
- Height

250 mm
325 mm outside basic flange for stroke

Base flange: 63 CF or 35 CF

Slit blade length (max.): 55 mm for 63 CF
32 for 35 CF

Cooling: Watercoolingasoption

Drain current measurement: as option

Drive: Manually or motorized

Motorization: Stepper motor, 400 full steps

Stroke: ± 12.5 mm, ± 25 mm, ± 50 mm

Resolution: 0.005 mm per full step

Repeatability: 0.005 mm

Repeat accuracy of reference point switch: ± 0,002 mm

Linear encoder: Renishaw RGH 24

Reference switch: Renishaw

Limit switch: MyComor Cherry

Leakage rate: < 1 x 10-10 mbar l s-1